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Ion implantation range and energy deposition distributions

Brice, David K

Ion implantation range and energy deposition distributions /IFI/Plenum, Vol. 1 high incident ion energies - New York: IFI/Plenum, 1975 - xii, 590p.

Subjects--Topical Terms:
Ion range distribution

Subjects--Index Terms: Energy distribution

Universal Decimal Class. No.: 541.132.3 / L5.1

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