Fine line lithography 

 - Amsterdam:   North-Holland Publishing Company,   1980 
 - 481p.  
<br/><br/> Vol. 1; Materials processing-Theory and practices ISBN:0-444-85351-0; ix, 481p.  
<br/><br/><label>ISBN: </label>0-444-85351-0 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Lithography
<br/><br/><label>Subjects--Index Terms: </label>X-ray 
<br/><br/><label>Universal Decimal Class. No.: </label>D 655.226   / M0