Microlithography / Proceedings of the first national symposium on microlithography...............................................11-12 March, 1986 - New Delhi: Tata McGraw-Hill Publishing Company Ltd, 1987 - xi, 307p. ISBN: 0-07-460064-8 Subjects--Topical Terms: Proceedings Universal Decimal Class. No.: D 763:621.3(082.2) / M7