Elliott, David J Microlithography: Process technology for IC fabrication - New York: McGraw-Hill book Company, 1986 - xix, 378p. ISBN: 0-07-019304-5 Subjects--Topical Terms: Microlithography Subjects--Index Terms: Resist coating and softbake Universal Decimal Class. No.: D 776:621.3.049.77 / M6