Castellano, Robert N <br/><br/>
Semiconductor device processing:   Technology trends in the VLSI era 

 - USA:      Gordon and Breach Science Publishers,       1993 
 - 234p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Science
<br/><br/><label>Subjects--Index Terms: </label>Physics 
<br/><br/><label>Universal Decimal Class. No.: </label>621.382  / N3