Defects in silicon /Proceeding of symposium on science and technology of defects in silicon of the 1989 E MRS conference Strasbourg, France, 30 may - 2 june 1989 - Amsterdam: North-Holland, 1989 - 505p. ISBN: 0-444-88619-2 Subjects--Topical Terms: Silicon Subjects--Index Terms: Technology Universal Decimal Class. No.: 620.19:546.28(082.2) / M9