Materials and process characterization for vlsi, 1988 (ICMC '88) / Proceedings of the international conference 24-29 October, 1988 Shangai, China - Singapore: World Scientific, 1988 - xix, 531p. ISBN: 9971-50-688-2 Subjects--Topical Terms: Proceedings Universal Decimal Class. No.: 621.3.049.77 / M8