Environmental control in electronic manufacturing  

 - New York:   Van Nostrand Reinhold Company,    1973 
 - xiii, 474p. 
<br/><br/><label>ISBN: </label>0-442-25564-2 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic manufacturing
<br/><br/><label>Subjects--Index Terms: </label>Microscopy 
<br/><br/><label>Universal Decimal Class. No.: </label>621.38.002.2:628.5  / L3