Ghandhi, Sorab K <br/><br/>
VLSI fabrication principles:   Silicon and gallium arsenide 

 - New York:   John Wiley & Sons,   1983 
 - xi, 665p. 
<br/><br/><label>ISBN: </label>0471868337 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon	
<br/><br/><label>Subjects--Index Terms: </label>Integrated circuits--Very large scale integration 
<br/><br/><label>Universal Decimal Class. No.: </label>621.3.049.771.14  / M3