000 00465nam a22001577a 4500
008 230317b |||||||| |||| 00| 0 eng d
040 _aNational Science Library
_cNational Science Library
080 _aD 655.226:54
_bK1
100 _aHartsuch, Paul J
_93703
245 _aChemistry of lithography
260 _aNew York:
_bLithographic Technical Foundation,
_c1961
300 _a358p.
650 _aScience
653 _aChemistry, Technical
942 _2udc
_cBK
999 _c10910
_d10910