| 000 | 00457nam a22001457a 4500 | ||
|---|---|---|---|
| 008 | 230317b |||||||| |||| 00| 0 eng d | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 |
_aD 655.226:53.08 _bK3 |
||
| 100 |
_aReed, Robert F _93728 |
||
| 245 | _aInstruments for quality control in lithography | ||
| 260 |
_aNew York: _bLithographic Technical foundation, _c1963 |
||
| 300 | _axvii, 102p. | ||
| 650 | _aScience | ||
| 942 |
_2udc _cBK |
||
| 999 |
_c10961 _d10961 |
||