| 000 | 00568nam a22001937a 4500 | ||
|---|---|---|---|
| 008 | 230321b |||||||| |||| 00| 0 eng d | ||
| 020 | _a81-224-0561-4 | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 |
_a655.226 _bN3 |
||
| 100 |
_aTandon, U S _94084 |
||
| 245 | _aPatterning of material layers in submicron region | ||
| 260 |
_aNew Delhi: _bWiley Eastern Limited, _c1993 |
||
| 300 | _axii, 183p. | ||
| 650 | _aGraphic industries | ||
| 653 | _aLithography | ||
| 653 | _aX-ray masks | ||
| 700 | _aKhokle, W S | ||
| 942 |
_2udc _cREF |
||
| 999 |
_c11881 _d11881 |
||