| 000 | 00536nam a22001457a 4500 | ||
|---|---|---|---|
| 008 | 230329b |||||||| |||| 00| 0 eng d | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 |
_a661.68(082.2) _bL0 |
||
| 245 |
_aSilicon device processing _c/ Processdings of a Symposium Held at Gaithersburg, Maryland June 2-3 1970 |
||
| 260 |
_aMaryland: _bNational Bureau of Standard Special Publication 337, _c1970 |
||
| 300 | _ax, 457p. | ||
| 650 | _aChemicals | ||
| 700 | _aMarsden, Charles P (Ed.) | ||
| 942 |
_2udc _cREF |
||
| 999 |
_c16479 _d16479 |
||