000			00564nam a22001457a 4500
008			230331b |||||||| |||| 00| 0 eng d
020			_a0-07-460064-8
040			_aNational Science Library _cNational Science Library
080			_aD 763:621.3(082.2) _bM7
245			_aMicrolithography _c/ Proceedings of the first national symposium on microlithography...............................................11-12 March, 1986
260			_aNew Delhi: _bTata McGraw-Hill Publishing Company Ltd, _c1987
300			_axi, 307p.
650			_aProceedings
942			_2udc _cPR
999			_c17236 _d17236