| 000 | 00548nam a22001697a 4500 | ||
|---|---|---|---|
| 008 | 230331b |||||||| |||| 00| 0 eng d | ||
| 020 | _a0-07-019304-5 | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 |
_aD 776:621.3.049.77 _bM6 |
||
| 100 |
_aElliott, David J _95997 |
||
| 245 |
_aMicrolithography: _bProcess technology for IC fabrication |
||
| 260 |
_aNew York: _bMcGraw-Hill book Company, _c1986 |
||
| 300 | _axix, 378p. | ||
| 650 | _aMicrolithography | ||
| 653 | _aResist coating and softbake | ||
| 942 |
_2udc _cBK |
||
| 999 |
_c17333 _d17333 |
||