000 | 00468nam a22001577a 4500 | ||
---|---|---|---|
008 | 230501b |||||||| |||| 00| 0 eng d | ||
040 |
_aNational Science Library _cNational Science Library |
||
080 |
_a539.23 _bK9 |
||
100 |
_aChopra, Kasturi L _97897 |
||
245 | _aThin film phenomena | ||
260 |
_aNew York: _bMcgraw-Hill Book Company, _c1969 |
||
300 | _axx, 844p. | ||
650 | _aDeposition technology | ||
653 | _aCathodic sputtering | ||
942 |
_2udc _cBK |
||
999 |
_c25277 _d25277 |