000 00468nam a22001577a 4500
008 230501b |||||||| |||| 00| 0 eng d
040 _aNational Science Library
_cNational Science Library
080 _a539.23
_bK9
100 _aChopra, Kasturi L
_97897
245 _aThin film phenomena
260 _aNew York:
_bMcgraw-Hill Book Company,
_c1969
300 _axx, 844p.
650 _aDeposition technology
653 _aCathodic sputtering
942 _2udc
_cBK
999 _c25277
_d25277