| 000 | 00547nam a22001577a 4500 | ||
|---|---|---|---|
| 008 | 230501b |||||||| |||| 00| 0 eng d | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 |
_a541.132.3 _bL5.1 |
||
| 100 |
_aBrice, David K _97990 |
||
| 245 |
_aIon implantation range and energy deposition distributions _c/IFI/Plenum, Vol. 1 high incident ion energies |
||
| 260 |
_aNew York: _bIFI/Plenum, _c1975 |
||
| 300 | _axii, 590p. | ||
| 650 | _aIon range distribution | ||
| 653 | _aEnergy distribution | ||
| 942 |
_2udc _cBK |
||
| 999 |
_c25661 _d25661 |
||