| 000 | 00510nam a22001577a 4500 | ||
|---|---|---|---|
| 008 | 230602b |||||||| |||| 00| 0 eng d | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 |
_a620.191(082.2) _bL9.1 |
||
| 245 |
_aSurface contamination: _bGenesis detection and control _c/ Plenum Press, Volume 1 |
||
| 260 |
_aNew York: _bPlenum Press, _c1981 |
||
| 300 | _axvi, 523p., xxx | ||
| 650 | _aContamination | ||
| 653 | _aFabrication | ||
| 700 | _aMittal, K L (Ed.) | ||
| 942 |
_2udc _cBK |
||
| 999 |
_c38394 _d38394 |
||