| 000 | 00470nam a22001577a 4500 | ||
|---|---|---|---|
| 008 | 230606b |||||||| |||| 00| 0 eng d | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 |
_a621.382(082.2) _bL5 |
||
| 245 |
_aIon implantation in semiconductors: _bScience and technology |
||
| 260 |
_aLondon: _bPlenum Press, _c1974 |
||
| 300 | _a742p. | ||
| 650 | _aScience | ||
| 653 | _aPhysics | ||
| 700 | _aNamba, Susumu (Ed.) | ||
| 942 |
_2udc _cBK |
||
| 999 |
_c40012 _d40012 |
||