000			00539nam a22001697a 4500
008			230606b |||||||| |||| 00| 0 eng d
040			_aNational Science Library _cNational Science Library
080			_a621.382.049(082.2) _bL7
245			_aProcess and device modeling for integrated circuit design
260			_aLeyden: _bNoordhoff International Publishing, _c1977
300			_a867p.
650			_aScience
653			_aPhysics
700			_aWiele, Fernand Van De (Ed.)
700			_aEngl, Walter L (Ed.)
942			_2udc _cBK
999			_c40060 _d40060