| 000 | 00525nam a22001697a 4500 | ||
|---|---|---|---|
| 008 | 230607b |||||||| |||| 00| 0 eng d | ||
| 020 | _a0-306-65198-X | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 |
_aR 016:621.315.592 _bM1 |
||
| 100 |
_aAgajanian, A H _910064 |
||
| 245 |
_aIon implantation in microelectronics: _bA comprehensive bibliography |
||
| 260 |
_aNew York: _bIFI/Plenum, _c1981 |
||
| 300 | _ax, 255p. | ||
| 650 | _aBibliography | ||
| 653 | _aMicroelectronics | ||
| 942 |
_2udc _cREF |
||
| 999 |
_c40525 _d40525 |
||