| 000 | 00528nam a22001697a 4500 | ||
|---|---|---|---|
| 008 | 230504b |||||||| |||| 00| 0 eng d | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 |
_a621.793 _bM2 |
||
| 100 | _aBunshah, Rointan F | ||
| 245 |
_aDeposition technologies for films and coatings: _bDevelopments and applications |
||
| 260 |
_aNew Jersey: _bNoyes Data Corporation, _c1982 |
||
| 300 | _a585p. | ||
| 650 | _aScience | ||
| 653 | _aChemistry | ||
| 700 | _aBlocher, John M | ||
| 942 |
_2udc _cBK |
||
| 999 |
_c40678 _d40678 |
||