| 000 | 00597nam a22001697a 4500 | ||
|---|---|---|---|
| 008 | 230613b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9971-50-688-2 | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 |
_a621.3.049.77 _bM8 |
||
| 245 |
_aMaterials and process characterization for vlsi, 1988 (ICMC '88) _c/ Proceedings of the international conference 24-29 October, 1988 Shangai, China |
||
| 260 |
_aSingapore: _bWorld Scientific, _c1988 |
||
| 300 | _axix, 531p. | ||
| 650 | _aProceedings | ||
| 700 | _aZong, X-F (Ed) | ||
| 700 | _aWang, Y-Y (ed.) | ||
| 942 |
_2udc _cPR |
||
| 999 |
_c42589 _d42589 |
||