| 000 | 00543nam a22001697a 4500 | ||
|---|---|---|---|
| 008 | 230626b |||||||| |||| 00| 0 eng d | ||
| 020 | _a0471868337 | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 |
_a621.3.049.771.14 _bM3 |
||
| 100 | _aGhandhi, Sorab K | ||
| 245 |
_aVLSI fabrication principles: _bSilicon and gallium arsenide |
||
| 260 |
_aNew York: _bJohn Wiley & Sons, _c1983 |
||
| 300 | _axi, 665p. | ||
| 650 | _aSilicon | ||
| 653 | _aIntegrated circuits--Very large scale integration | ||
| 942 |
_2udc _cBK |
||
| 999 |
_c47210 _d47210 |
||