| 000 | 00499nam a22001697a 4500 | ||
|---|---|---|---|
| 008 | 230712b |||||||| |||| 00| 0 eng d | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 | _a539.23(05) | ||
| 245 |
_aPhysics of thin films: _bAdvances in research and development |
||
| 260 |
_aNew York: _bAcademic Press, _c1966 |
||
| 300 | _axiii, 318p. | ||
| 500 | _aVol. 3 | ||
| 650 | _aPhysics | ||
| 653 | _aCathode sputtering | ||
| 700 | _aHass, Georg (Ed.) | ||
| 942 |
_2udc _cBK |
||
| 999 |
_c51807 _d51807 |
||