000 00465nam a22001337a 4500
008 230721b |||||||| |||| 00| 0 eng d
040 _aNational Science Library
_cNational Science Library
245 _aEllipsometry in the measurement of surfaces and thin films
_c/ U. S. Department of Commerce
260 _aCalifornia:
_bU. S. Department of Commerce,
_c1963
650 _aAutomation
653 _aIndexing
700 _aPassaglia, E (Ed.)
942 _2udc
_cREP
999 _c56438
_d56438