000 | 00465nam a22001337a 4500 | ||
---|---|---|---|
008 | 230721b |||||||| |||| 00| 0 eng d | ||
040 |
_aNational Science Library _cNational Science Library |
||
245 |
_aEllipsometry in the measurement of surfaces and thin films _c/ U. S. Department of Commerce |
||
260 |
_aCalifornia: _bU. S. Department of Commerce, _c1963 |
||
650 | _aAutomation | ||
653 | _aIndexing | ||
700 | _aPassaglia, E (Ed.) | ||
942 |
_2udc _cREP |
||
999 |
_c56438 _d56438 |