000 00318nam a22001097a 4500
008 230809b |||||||| |||| 00| 0 eng d
022 _a0274-4324
040 _aNational Science Library
_cNational Science Library
245 _aPlasma chemistry and plasma processing
260 _aNew York:
_bPlenum Press,
942 _cCR
999 _c58353
_d58353