| 000 | 00344nam a22001097a 4500 | ||
|---|---|---|---|
| 008 | 230906b |||||||| |||| 00| 0 eng d | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 245 | _aJournal of vacuum science and technology | ||
| 260 |
_aNew York: _bAmerican Institute of Physics, _c1964 |
||
| 310 | _aBi-monthly | ||
| 942 | _cCR | ||
| 999 |
_c60443 _d60443 |
||