| 000 | 00386nam a22001217a 4500 | ||
|---|---|---|---|
| 008 | 230906b |||||||| |||| 00| 0 eng d | ||
| 022 | _a0734-211X | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 245 |
_aJournal of vacuum science and technology: _bSeries-B |
||
| 260 |
_aNew York: _bAmerican Institute of Physics, _c1983 |
||
| 310 | _aQuarterly | ||
| 942 |
_cCR _2udc |
||
| 999 |
_c60467 _d60467 |
||