| 000 | 00409nam a2200145 4500 | ||
|---|---|---|---|
| 008 | 240730b |||||||| |||| 00| 0 eng d | ||
| 020 | _a0070162301 | ||
| 040 |
_aNational Science Library _cNational Science Library |
||
| 080 |
_a776 _bL5 |
||
| 100 | _aDeForest, W S | ||
| 245 |
_aPhotoresist: _bMaterials and processes |
||
| 260 |
_aNew York: _bMcGraw-Hill, _c1975 |
||
| 300 | _axi, 269p. | ||
| 942 |
_2udc _cBK |
||
| 999 |
_c65127 _d65127 |
||