Ion implantation in microelectronics: A comprehensive bibliography
Material type: TextPublication details: New York: IFI/Plenum, 1981Description: x, 255pISBN:- 0-306-65198-X
Item type | Current library | Collection | Call number | Materials specified | Status | Date due | Barcode |
---|---|---|---|---|---|---|---|
Reference | National Science Library | Reference | R 016:621.315.592 M1 (Browse shelf(Opens below)) | Not for loan | 103269 |
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