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Ion implantation in microelectronics: A comprehensive bibliography

By: Material type: TextTextPublication details: New York: IFI/Plenum, 1981Description: x, 255pISBN:
  • 0-306-65198-X
Subject(s):
Item type: Reference
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Item type Current library Collection Call number Materials specified Status Date due Barcode
Reference Reference National Science Library Reference R 016:621.315.592 M1 (Browse shelf(Opens below)) Not for loan 103269

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