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Ion implantation in microelectronics: A comprehensive bibliography

Agajanian, A H

Ion implantation in microelectronics: A comprehensive bibliography - New York: IFI/Plenum, 1981 - x, 255p.

ISBN: 0-306-65198-X

Subjects--Topical Terms:
Bibliography

Subjects--Index Terms: Microelectronics

Universal Decimal Class. No.: R 016:621.315.592 / M1

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