Materials and process characterization for vlsi, 1988 (ICMC '88)
Materials and process characterization for vlsi, 1988 (ICMC '88)
/ Proceedings of the international conference 24-29 October, 1988 Shangai, China
- Singapore: World Scientific, 1988
- xix, 531p.
9971-50-688-2
Proceedings
621.3.049.77 / M8
9971-50-688-2
Proceedings
621.3.049.77 / M8