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Materials and process characterization for vlsi, 1988 (ICMC '88)

Materials and process characterization for vlsi, 1988 (ICMC '88) / Proceedings of the international conference 24-29 October, 1988 Shangai, China - Singapore: World Scientific, 1988 - xix, 531p.

9971-50-688-2


Proceedings

621.3.049.77 / M8