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Patterning of material layers in submicron region (Record no. 11881)

MARC details
000 -LEADER
fixed length control field 00568nam a22001937a 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 230321b |||||||| |||| 00| 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 81-224-0561-4
040 ## - CATALOGING SOURCE
Original cataloging agency National Science Library
Transcribing agency National Science Library
080 ## - UNIVERSAL DECIMAL CLASSIFICATION NUMBER
Universal Decimal Classification number 655.226
Item number N3
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Tandon, U S
9 (RLIN) 4084
245 ## - TITLE STATEMENT
Title Patterning of material layers in submicron region
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. New Delhi:
Name of publisher, distributor, etc. Wiley Eastern Limited,
Date of publication, distribution, etc. 1993
300 ## - PHYSICAL DESCRIPTION
Extent xii, 183p.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Graphic industries
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Lithography
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term X-ray masks
700 ## - ADDED ENTRY--PERSONAL NAME
Personal name Khokle, W S
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme Universal Decimal Classification
Koha item type Reference
Holdings
Withdrawn status Lost status Damaged status Not for loan Collection Home library Current library Shelving location Date acquired Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
        Reference National Science Library National Science Library GF/Rk-19/C-2/R-2 20/11/1993   655.226 N3 174187 21/03/2023 21/03/2023 Reference