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Microlithography: Process technology for IC fabrication

Elliott, David J

Microlithography: Process technology for IC fabrication - New York: McGraw-Hill book Company, 1986 - xix, 378p.

ISBN: 0-07-019304-5

Subjects--Topical Terms:
Microlithography

Subjects--Index Terms: Resist coating and softbake

Universal Decimal Class. No.: D 776:621.3.049.77 / M6

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