Microlithography: Process technology for IC fabrication
Material type: TextPublication details: New York: McGraw-Hill book Company, 1986Description: xix, 378pISBN:- 0-07-019304-5
Item type | Current library | Call number | Materials specified | Status | Date due | Barcode |
---|---|---|---|---|---|---|
Books | National Science Library | D 776:621.3.049.77 M6 (Browse shelf(Opens below)) | Available | 168298 |
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