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Materials and process characterization for vlsi, 1988 (ICMC '88) / Proceedings of the international conference 24-29 October, 1988 Shangai, China

Contributor(s): Material type: TextTextPublication details: Singapore: World Scientific, 1988Description: xix, 531pISBN:
  • 9971-50-688-2
Subject(s):
Item type: Proceedings
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