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	1.		Microlithography: Process technology for IC fabrication by Elliott, David J Material type: Text; Format: print ; Literary form: Not fiction Publication details: New York: McGraw-Hill book Company, 1986 Availability: Items available for loan: National Science Library (1)Call number: D 776:621.3.049.77 M6. Place hold Add to cart (remove)
	2.		Integrated circuit mask technology by Elliott, David J Material type: Text; Format: print ; Literary form: Not fiction Publication details: New York: McGraw-Hill Book Company, 1985 Availability: Items available for loan: National Science Library (1)Call number: 621.3.049.77 M5. Place hold Add to cart (remove)

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